Process for fabricating micromachines

Details Process for fabricating micromachines Process for fabricating micromachines

C - Chemistry, Metallurgy

04

B

C04B 41/91 (2006.01) C04B 41/53 (2006.01) C23C 16/00 (2006.01) C23C 16/40 (2006.01) G03F 7/00 (2006.01) H01L 21/306 (2006.01) H01L 21/311 (2006.01)

Patent

CA 2069227

A novel ceramic material for sacrificial layers used in the process for fabricating "micromachined" having dimensions of several tens micrometers to several hundreds micrometers. The sacrificial layers are made of oxide ceramic containing rare earth, Ba and Cu such as Re 1 Ba 2 Cu 3 O 7-x (Re = rare earth) which can be etched easily and selectively with HC? solution (1/1000) without spoiling dimensional precision of the machine elements.

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