Method for increasing rate of coating using vaporized reactants

Details Method for increasing rate of coating using vaporized reactants Method for increasing rate of coating using vaporized reactants

C - Chemistry, Metallurgy

23

C

117/85

C23C 16/40 (2006.01) C03C 17/00 (2006.01) C03C 17/245 (2006.01)

Patent

CA 1009910

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