G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 6/132 (2006.01) C03B 19/14 (2006.01) H05H 1/42 (2006.01)
Patent
CA 2313258
Equipment for forming layers of vitreous silica, pure or doped, on a plate of silica uses an inductively coupled plasma torch (1) as the heat source, and comprises means (7, 8, 13-15) for supplying the torch (1) with the gases to be used for creating the plasma, sources (19, 20) of reagents for forming the materials to be deposited, and means for imparting to the plate a reciprocating movement in a direction perpendicular to the axis of the torch (1). The sources (19, 20) of reagents enable the reagents to be introduced into the tail of the plasma, in a free atmosphere, and supply reagents in the vapour state. The means (7, 8, 13-15) for supplying the torch (1) with the gases to be used for creating the plasma supply these gases at a pressure substantially equal to atmospheric pressure.
Agilent Technologies Inc.
Sim & Mcburney
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