Method of making prestructure for mems systems

Details Method of making prestructure for mems systems Method of making prestructure for mems systems

G - Physics

02

F

G02F 1/01 (2006.01) B81B 7/02 (2006.01) G02B 26/00 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2520376

A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator elements have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.

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