G - Physics – 03 – F
Patent
G - Physics
03
F
G03F 1/14 (2006.01)
Patent
CA 2056299
Abstract of the Disclosure Disclosed is a pellicle structure comprising a frame having a vertical through opening, a pellicle film spread on the upper end of the opening of the frame, said pellicle film having a coating layer formed at least on the inner surface thereof, and a bonding portion for bonding the end edge of the frame to the peripheral edge of the pellicle film through an adhesive layer, wherein a coating agent in the bonding portion is dissolved or dispersed in the adhesive and the pellicle film substrate is directly contacted and bonded to the adhesive. This pellicle structure is seepared according to process for the preparation of a pellicle structure, which comprises coating an adhesive, capable of dissolving therein the coating layer of a pellicle film having a coating layer formed at least on the surface to be formed as the inner surface, on the top end of the opening of a frame having a vertical through opening, contacting the adhesive-coated surface of the frame with the surface on the coating layer of the pellicle film, dissolving and removing the coating layer in the bonded portion while maintaining the contact state, and curing the adhesive on the coated surface, whereby the pellicle film is directly bonded to the frame without the interposing coating layer.
Fujita Minoru
Nakagawa Hiroaki
Saito Tsutomu
Fujita Minoru
Kirby Eades Gale Baker
Mitsui Chemicals Incorporated
Nakagawa Hiroaki
Saito Tsutomu
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