Method for manufacturing a grain boundary type josephson...

Details Method for manufacturing a grain boundary type josephson... Method for manufacturing a grain boundary type josephson...

H - Electricity

01

L

H01L 21/268 (2006.01) H01L 21/304 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2143522

The present invention relates to a method for manufacturing a grain boundary type Josephson junction device, in which a step is formed on a deposition surface of a substrate for depositing a thin film on it. According to the method, the step is formed by etching a portion of the deposition surface of the substrate by emitting a laser beam to the portion.

La présente invention est une méthode de fabrication d'un dispositif de jonction Josephson de type à joint de grain pendant laquelle un cran est formé sur une surface de dépôt d'un substrat afin d'y déposer une couche mince. Selon la méthode, le cran est formé en gravant, au moyen d'une émission de faisceau laser, une partie de la surface de dépôt du substrat.

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