Addressable valve arrays for proportional pressure or flow...

F - Mech Eng,Light,Heat,Weapons – 15 – B

Patent

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F15B 11/042 (2006.01) F15B 11/028 (2006.01) F15C 5/00 (2006.01) G05D 7/06 (2006.01) G05D 16/20 (2006.01)

Patent

CA 2385855

An addressable array (11, 37) is interposed between a source pressure (Ps) and an exit pressure (Pe) chamber. The array (11, 37) comprises a plurality of valves, the total open area of which define the opening between the source pressure (Ps) and the exit pressure (Pe). Also provided is an actuator for separately actuating each valve of the array between an open and a closed condition, whereby the total number of open valves determines the flow between the source pressure and the exit pressure. The preferred valves are electrostatically actuated valves including upper and lower electrodes addressable by a conductor, and are fabricated monolithically on a substrate.

L'invention concerne un réseau adressable (11, 37) intercalé entre une chambre de pression source (Ps) et une chambre de pression de sortie (Pe). Le réseau (11, 37) comprend plusieurs soupapes dont la zone ouverte totale définit l'ouverture entre la pression source (Ps) et la pression de sortie (Pe). L'invention concerne également un actionneur servant à actionner séparément chaque soupape du réseau entre un état ouvert et un état fermé, le nombre total de soupapes ouvertes déterminant le débit entre la pression source et la pression de sortie. Les soupapes utilisées sont de préférence des soupapes à actionnement électrostatique comprenant des électrodes supérieures et inférieures adressables par un conducteur et fabriquées en structure monolithique sur un substrat.

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