Sensor unit, process and device for inspecting the surface...

G - Physics – 01 – N

Patent

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G01N 21/898 (2006.01)

Patent

CA 2287242

The invention concerns a sensor unit (50), a device and a process for the inspection of the surface (10', 10") of an object (10) for the purpose of identifying surface characteristics, such as structural defects. The device contains an emitting module (51), which emits at least one beam bundle (6, 6', 6"), and a receiving module (52) with at least one light receiver (15, 16, 20). In the focal point of a parabolic mirror (1) a rotating polygonal mirror wheel (2) is located, on to which the beam bundle (6) of the laser (3, 4) is directed by means of a telecentric lens, which guides the emitter -and receiver beam on the same optical axis, whereby the parabolic mirror (1) guides the deflected beam bundle (6, 6', 6") under a constant angle relative to the symettry axis (7) of the parbolic minor (1) along a scanning line (23, 24) over the object (10) and the diffusely reflected beam bundle after its deflection out of the common beam path impinges on the processing unit (5).

L'invention concerne une unité de détection, un procédé et un dispositif d'inspection de la surface (10', 10'') d'un objet (10) afin de déterminer les caractéristiques de sa surface, telles que les perturbations de sa structure. Le dispositif comprend un module émetteur (51) qui émet au moins un faisceau de rayonnements (6, 6', 6'') et un module récepteur (52) avec au moins un photorécepteur (15, 16, 20). Une roue à miroir polygonal (2) est montée rotative dans le foyer d'un miroir parabolique. Le faisceau de rayonnements (6) du laser (3, 4) est dirigé sur la roue à miroir polygonal (2) au moyen d'une unité optique télécentrique qui dirige le faisceau de l'émetteur et du récepteur sur le même axe optique. Le miroir parabolique (1) dirige le faisceau de rayonnements dévié (6, 6', 6'') sur l'objet (10) le long d'une ligne d'exploration (23, 24) sous un angle constant par rapport à l'axe de symétrie (7) du miroir parabolique (1). Le faisceau de rayonnements réfléchi par le miroir hors du trajet optique commun incide sur l'unité de traitement (5).

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