Optical planar waveguide

Details Optical planar waveguide Optical planar waveguide

G - Physics

02

B

G02B 6/132 (2006.01) G02B 6/13 (2006.01) H01L 27/14 (2006.01) G02B 6/12 (2006.01)

Patent

CA 2441229

An improvement is provided in a process for fabricating an optical planar waveguide. This improvement includes the essential step of forming a valve metal oxide on a glass-like supporting substrate by anodic oxidation of a valve metal coating on the supporting substrate. The optical planar waveguides which have been produced by the procedures described herein provide a waveguide material having refractive index above 2Ø This may be left as is, using air, refractive index 1.0 as the upper cladding, or it can be over-coated with other suitable materials to give an upper cladding of refractive index similar to the substrate material or any other value as required by the design.

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