Sog with moisture-resistant protective capping layer

Details Sog with moisture-resistant protective capping layer Sog with moisture-resistant protective capping layer

H - Electricity

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117/104, 356/136

H01L 27/04 (2006.01) H01L 21/3105 (2006.01) H01L 21/316 (2006.01) H01L 21/768 (2006.01) H01L 21/822 (2006.01) H01L 23/29 (2006.01) H01L 23/31 (2006.01)

Patent

CA 2017720

A method of applying spin-on glass (SOG) on a substrate over low-melting point, non-refractory materials such as aluminum, is disclosed. In the method a layer of applied spin-on glass is subjected to disconnection and outgassing of water and reaction by-products, and then capped with a protective dielectric layer resistant to moisture diffusion.

Cette invention concerne une méthode de dépôt de verre par rotation sur un substrat en matériau non réfractaire à bas point de fusion tel que l'aluminium. La pellicule de verre déposée par rotation selon la présente méthode est soumise à un traitement de dissociation et de dégazage de l'eau et des sous-produits de réaction puis encapsulé sous une couche diélectrique de protection résistant à la diffusion de l'humidité.

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