H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 39/24 (2006.01)
Patent
CA 2135500
The present invention relates to a method for forming a step on a deposition surface of a substrate for depositing a thin film on it. The method comprises steps of etching a portion of the deposition surface of the substrate and conducting heat treatment of the substrate so as to recover crystallinity of the etched surface. The method can comprise steps of etching a portion of the deposition surface of the substrate and further etching the etched portion of the deposition surface of the substrate slightly so as to remove a degraded surface.
Bereskin & Parr
Sumitomo Electric Industries Ltd.
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