Electrostatic adhesion tester for thin film conductors

Details Electrostatic adhesion tester for thin film conductors Electrostatic adhesion tester for thin film conductors

G - Physics

01

N

G01N 19/04 (2006.01) G01N 3/00 (2006.01)

Patent

CA 2284831

An electrostatic adhesion tester for thin film conductors. In one embodiment, a device is provided for testing the adhesion strength of a thin film conductor that has been formed upon a substrate. The device includes an adhesion tester that is primarily comprised of a conducting portion. The conducting portion is applied to the thin film conductor so that it does not physically contact the thin film conductor, but leaves a small space therebetween. A power supply may further be provided for coupling to either the adhesion tester, the thin film conductor, or both in order to create a potential difference between the conducting portion and the thin film conductor. The potential difference creates an electric field between the conducting portion and the thin film conductor that induces stress in the thin film conductor. A measuring device may also be provided for coupling to the adhesion tester and the thin film conductor in order to measure an electrical parameter of the electric field, which is indicative of the adhesion strength.

L'invention porte sur un testeur électrostatique de l'adhérence de conducteurs en couches minces. Dans l'une des exécutions, il s'agit d'un dispositif d'essai de l'adhérence d'un conducteur en couche mince formé sur un substrat. Le dispositif comporte le testeur principalement constitué d'une partie conductrice qu'on applique sur le conducteur en couche mince, mais sans contact physique, en laissant un faible espace entre eux. On relie ensuite une source de tension soit au testeur, soit au conducteur en couche mince, soit aux deux, pour créer entre eux une différence de potentiel laquelle crée entre la partie conductrice et le conducteur en couche mince un champ électrique qui produit des contraintes dans conducteur en couche mince. On peut également prévoir un appareil de mesure relié au testeur et au conducteur en couche mince et mesurant l'un des paramètres du champ électrique révélateur de la force d'adhérence.

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