Method of producing articles by chemical vapor deposition...

Details Method of producing articles by chemical vapor deposition... Method of producing articles by chemical vapor deposition...

C - Chemistry, Metallurgy

23

C

C23C 16/26 (2006.01) C23C 16/01 (2006.01) C23C 16/27 (2006.01) C23C 16/56 (2006.01) C23G 1/10 (2006.01)

Patent

CA 2065724

RD-21,034 An Improved Method of Producing Articles by Chemical Vapor Deposition and The Support Mandrels Used Therein An improved method of producing a diamond tube by chemical vapor deposition and a hollow support mandrel used therein. The method comprises depositing a diamond film on an outer side of the hollow mandrel by the CVD process. The mandrel is then etched away by subjecting an inner side of the mandrel to the etching action. It was unexpectedly discovered that the etch time is drastically reduced by using the hollow mandrels.

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