Solid-state inertial sensor on chip

Details Solid-state inertial sensor on chip Solid-state inertial sensor on chip

G - Physics

01

C

G01C 19/56 (2006.01) G01P 15/02 (2006.01) H01L 41/18 (2006.01)

Patent

CA 2733940

Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward.

La présente invention concerne un capteur inertiel monolithique à létat solide. Le capteur détecte la vitesse de rotation autour de trois axes perpendiculaires et comprend une structure cristalline piézoélectrique monolithique micro-usinée comportant un nombre égal de dents dentraînement vibratoire et de détection sur chaque côté dun axe de symétrie du capteur, les dents étant synchronisées pour être animées de mouvements dactionnement alternés vers lintérieur et vers lextérieur.

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