H - Electricity – 01 – B
Patent
H - Electricity
01
B
H01B 12/06 (2006.01) C30B 23/02 (2006.01) C30B 29/22 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2103085
A method for preparing a thin film formed of an oxide superconductor on a substrate by emitting molecular beams of constituent elements of the oxide superconductor to the substrate under high vacuum, wherein at first a molecular beam of one of the constituent elements of the oxide superconductor, of which an oxide thin film can be deposited so as to have a smooth surface, is emitted so as to form the oxide thin film of one or two unit cells. And then, all the molecular beams of constituent elements of the oxide superconductor are emitted to the oxide thin film so as to form the oxide superconductor thin film.
Bereskin & Parr
Sumitomo Electric Industries Ltd.
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