Charged particled energy analyzer

Details Charged particled energy analyzer Charged particled energy analyzer

G - Physics

01

N

358/20

G01N 23/00 (2006.01) H01J 49/48 (2006.01)

Patent

CA 2012879

ABSTRACT A charged particle energy analyzer of an electrostatic concentric spherical surface type or a coaxial cylindrical mirror type analyzes the kinetic energy of charged particles emitted or scattered from a sample by irradiating an X-ray or particles to the sample. The energy analyzer comprises the sample and an outlet aperture arranged on the symmetric central axis passing through an electrostatic concentric spherical surface body or a coaxial cylindrical mirror body, an inlet port and an outlet port each having a circular-arc- like slit which has its center on the symmetric central axis, electrodes disposed at the slit of the inlet port to deflect the track of the charged particles and change the speed of the charged particles, and a position sensitive type detector disposed at the rear of the outlet aperture to detect the charged particles.

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