High purity phenyl silicone ladder polymer and method for...

Details High purity phenyl silicone ladder polymer and method for... High purity phenyl silicone ladder polymer and method for...

C - Chemistry, Metallurgy

08

G

402/26, 260/443.

C08G 77/04 (2006.01) C08G 77/06 (2006.01) C08G 77/14 (2006.01) C08G 77/18 (2006.01) C08G 77/34 (2006.01)

Patent

CA 2008679

High purity phenyl silicone ladder polymer, and a method for producing such polymer, suitable for use as the protective film, the interlayer insulating film, etc. in the fabrication of semiconductor elements, which polymer contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following general formula (I): Image (I) (where: R1 to R4 denote respectively hydrogen or a lower alkyl group; n is an integer of from 8 to 1,000); or the following general formula (II): Image (II) (where: n is an integer of from 8 to 1,600).

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