Rotatable magnetron including a replaceable target structure

Details Rotatable magnetron including a replaceable target structure Rotatable magnetron including a replaceable target structure

H - Electricity

01

J

H01J 23/00 (2006.01) H01J 9/50 (2006.01) H01J 37/34 (2006.01)

Patent

CA 2155295

An improved rotatable magnetron enabling efficient removal and replacement of a target structure, having axially movable structures including at least one spindle, which may be extended to engage or retracted to disengage the target structure, and means for extending into a magnet structure within the target structure to selectively fix a rotational position of the magnet structure, and preferably having water and vacuum seals integrated into cartridges which are disposed between spindles and seal housings of the improved rotatable magnetron.

Affiliated with

Also associated with

Rating

Rotatable magnetron including a replaceable target structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Rotatable magnetron including a replaceable target structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Rotatable magnetron including a replaceable target structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1608835