G - Physics – 06 – K
Patent
G - Physics
06
K
G06K 9/20 (2006.01) G06K 7/10 (2006.01)
Patent
CA 2073335
2073335 9110968 PCTABS00006 Methods and apparatus for machine reading of identification marks incised on semiconductor wafers. Preferred apparatus makes it possible to view the mark either as a dark image on a light background (which is in itself novel) or as a light image on a dark background. Using a television camera (7) and an optical character reader, the viewing method can be changed automatically if a preset confidence level is not reached, and provides a signal if neither method (or the combination of the two methods) gives a satisfactory result. The method is particulary useful for successively reading the identification marks on a number of wafers (41, 42, 43...) stacked in a cassette (4). Preferred apparatus for such reading comprises a wafer support (6) which can be pushed upwards from underneath the cassette (4) so that the wafer to be identified rests on one ledge (63) of the support and the adjacent wafer rests on another higher ledge (64) on the support, thus exposing and precisely locating the identification mark on the first wafer.
Hine Derek L.
Krolak Michael
Fetherstonhaugh & Co.
Hine Design Inc.
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