Laser having baffled enclosures

Details Laser having baffled enclosures Laser having baffled enclosures

H - Electricity

01

S

H01S 3/041 (2006.01)

Patent

CA 2468451

Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

Affiliated with

Also associated with

Rating

Laser having baffled enclosures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser having baffled enclosures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser having baffled enclosures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1635068