Microelectromechanical electric potential sensor

Details Microelectromechanical electric potential sensor Microelectromechanical electric potential sensor

G - Physics

01

R

G01R 29/12 (2006.01) B81B 5/00 (2006.01) B81B 7/02 (2006.01) H01L 35/00 (2006.01) H01L 37/00 (2006.01)

Patent

CA 2613961

An electrical potential sensor device comprises sensor electrodes arranged to measure a voltage based on a change in electrical charge induced in the sensor electrodes by exposure to an electrical potential of a source to be measured. An electro-thermally operated mechanism, adjacent to the sensor electrodes, is movable between a first position in which only first ones of the sensor electrodes are exposed to the electrical potential of the source to be measured and other sensor electrodes are shielded from the electrical potential, and a second position in which other ones of the sensor electrodes are exposed to the electrical potential and the first ones are substantially shielded from the electrical potential. A controller combines the output from the two sets of electrodes which are alternately exposed to the electrical potential to calculate a resulting measured/sensed voltage or measured/sensed electrical potential of the device.

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