Micro-displacement element, and scanning tunneling...

G - Physics – 11 – B

Patent

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G11B 9/14 (2006.01) B81B 3/00 (2006.01) H01L 41/09 (2006.01) G12B 21/04 (2006.01) G12B 21/02 (2006.01)

Patent

CA 2069702

A micro-displacement element comprises a unimorph cantilever having a piezoelectric thin film, a pair of electrodes between which the piezoelectric thin film is sandwiched, and an elastic thin film. One end of the cantilever is supported by a support, and the other end thereof is provided with a probe. The micro-displacement element can be used particularly as an array of plural elements, for an information processing apparatus in which the element faces to a recording medium such that an information recording pulse voltage or an information reproducing bias voltage can be applied to between the probe and the recording medium.

Cette invention concerne un élément à micro-déplacement comportant une poutre en porte-à-faux monomorphe portant une couche mince piézoélectrique, une paire d'électrodes de part et d'autre de cette couche mince piézoélectrique et une pellicule mince élastique. La poutre en porte-à-faux est encastrée à un bout et porte une sonde à son autre extrémité. L'élément à micro-déplacement peut faire partie d'un groupement d'éléments semblables dans un dispositif de traitement de l'information où il est disposé en face d'un support d'enregistrement de manière qu'une tension pulsée d'enregistrement ou une tension de lecture puisse être appliquée entre la sonde et le support d'enregistrement.

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