H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 39/24 (2006.01) C23C 14/28 (2006.01)
Patent
CA 2156878
The method for manufacturing a superconducting elements according to the present invention comprises following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the target comprises a target material of a complex oxide superconducting compounds; (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material so that the target material is deposited onto a surface of the substrate, wherein the surface of the substrate maintains the position to face the surface of the target; and (c) fabricating the surface of the target material layer on the substrate to form a superconducting element by irradiating a laser beam to the surface of the substrate, without removing the substrate from the chamber. The laser beam of the step (b) of irradiating a laser beam may traverse along a first optical path, and the laser beam of the step (c) of fabricating the surface of the target may traverse along a second optical path, which is not consistent with the first optical path.
Itozaki Hideo
Moto Akihiro
Nagaishi Tatsuoki
Marks & Clerk
Sumitomo Electric Industries Ltd.
LandOfFree
Method and apparatus for manufacturing superconducting... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for manufacturing superconducting..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for manufacturing superconducting... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1716107