Process for producing thin-film transistors

Details Process for producing thin-film transistors Process for producing thin-film transistors

H - Electricity

01

L

H01L 21/336 (2006.01) H01L 21/205 (2006.01) H01L 21/22 (2006.01) H01L 21/265 (2006.01) H01L 21/306 (2006.01) H01L 21/335 (2006.01) H01L 29/786 (2006.01)

Patent

CA 2251438

A process for producing thin-film transistors having amorphous silicon as semiconductor material whereby the amorphous silicon is doped by ion implantation through the metal layer for the drain and source contacts.

La présente invention porte sur un processus de fabrication de transistors à couches minces comprenant du silicium amorphe comme matériau semiconducteur, le silicium amorphe étant dopé par implantation d'ions à travers la couche métallique pour les contacts de drain et de source.

Affiliated with

Also associated with

Rating

Process for producing thin-film transistors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing thin-film transistors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing thin-film transistors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1735469