Apparatus and method for monitoring the coating process of a...

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G01N 21/71 (2006.01) C23C 4/00 (2006.01) C23C 4/12 (2006.01) G01J 5/00 (2006.01) G01J 5/08 (2006.01) G01N 21/73 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2218604

In order to render it possible to give a forecast relating to the quality of a coating layer applied to a substrate by a thermal coating apparatus, an apparatus is provided, comprising a plurality of sensors and/or comprises optical means, in order to separately monitor the radiation emitted by the heated particles entrained by the coating jet in particular areas along a section of the coating jet extending crosswise to the direction of the coating jet. The apparatus further comprises electronic circuitry connected to the outputs of the sensors for further processing the measured values. By means of such an apparatus, the coating jet can be systematically and representatively scanned and monitored. On the basis of the signals supplied by the sensors, the spatial distribution of the intensity of the electromagnetic radiation emitted by the heated particles can be determined and can be used as a relevant parameter for qualitatively judging the coating layer or for regulating the coating process.

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