Method for the production of structured layers on substrates

Details Method for the production of structured layers on substrates Method for the production of structured layers on substrates

H - Electricity

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H01L 21/316 (2006.01) B81C 1/00 (2006.01) C03B 19/00 (2006.01) C03C 4/12 (2006.01) C03C 14/00 (2006.01) C03C 15/00 (2006.01) C03C 17/02 (2006.01) C03C 17/34 (2006.01) C23C 14/10 (2006.01) H01L 21/027 (2006.01) H01L 21/3105 (2006.01) H01L 21/311 (2006.01) H01L 21/50 (2006.01) H01L 21/56 (2006.01) H01L 21/768 (2006.01) H01L 23/10 (2006.01) H01L 23/29 (2006.01) H01L 23/31 (2006.01) H01L 23/48 (2006.01) H01L 51/52 (2006.01) H01L 23/498 (2006.01) H05K 3/28 (2006.01)

Patent

CA 2479823

The invention relates to a method for the structured coating of a substrate (1) with at least one surface (2) for coating, which is suitable for the rapid and economical production of precise structuring. The method thus comprises the following steps: production of at least one negative structured first coating (3, 31, 32) on the at least one surface (2), deposition of at least one second layer (7, 71, 72, 73), which comprises a material with a glassy structure, on the surface (2) provided with the first coating (3, 31, 32) and at least partial removal of the first coating (3, 31, 32).

L'invention concerne un procédé de revêtement structuré d'un substrat (1) comportant au moins une surface (2) devant être revêtue, ledit procédé permettant de fabriquer de façon rapide et économique des structurations précises. Le procédé selon l'invention consiste à fabriquer au moins un premier revêtement (3, 31, 32) structuré de façon négative, sur la ou les surfaces (2), à déposer au moins une deuxième couche (7, 71, 72, 73) contenant un matériau présentant une structure de type verre, sur la surface (2) pourvue du premier revêtement (3, 31, 32), et à retirer au moins partiellement le premier revêtement (3, 31, 32).

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