Micro/nano chamber for thin film patterning

Details Micro/nano chamber for thin film patterning Micro/nano chamber for thin film patterning

H - Electricity

01

L

H01L 51/56 (2006.01) H01L 51/52 (2006.01)

Patent

CA 2562187

Disclosed is a technique for formation of micro-patterned layers by local evaporation from the source at the proximity of the Substrate.

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