Diamond film deposition

C - Chemistry – Metallurgy – 30 – B

Patent

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Details

C30B 29/04 (2006.01) C23C 16/02 (2006.01) C23C 16/27 (2006.01)

Patent

CA 2249288

A technique for producing diamond film, including the following steps: providing a substrate having a Young's modulus of less than 50 GPa; providing a coating material comprising a binder and diamond grit; applying the coating material to the substrate; and depositing diamond film on the coating by chemical vapor deposition. In a disclosed embodiment, the binder comprises a glass-forming oxide. In a most preferred embodiment, the glass forming oxide portion of the coating includes both silicon dioxide and aluminum oxide. A deposition target medium for use in fabrication of diamond film by chemical vapor deposition technique is also disclosed.

Cette invention concerne un procédé de production d'un film de diamant qui consiste à utiliser un substrat ayant un module de Young inférieur à 50 GPa, à utiliser un produit de revêtement contenant un liant et des grains de diamant, à appliquer ledit produit sur le substrat, puis à former un dépôt constituant un film de diamant sur le revêtement par un processus de dépôt chimique en phase vapeur. Dans une des réalisations de l'invention, le liant contient un oxyde susceptible de former du verre. Dans une réalisation idéale, la fraction d'oxyde susceptible de former du verre contenue dans le revêtement comporte à la fois du dioxyde de silicium et de l'oxyde d'aluminium. L'invention concerne également un milieu cible destiné à la formation du dépôt et utilisé pour la fabrication de film de diamant par dépôt chimique en phase vapeur.

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