Analyzer using plasma and analysis method using plasma,...

Details Analyzer using plasma and analysis method using plasma,... Analyzer using plasma and analysis method using plasma,...

H - Electricity

01

J

H01J 49/04 (2006.01) G01N 21/73 (2006.01) H01J 49/10 (2006.01)

Patent

CA 2185832

In an analyzer in which plasma is generated, a sample is supplied to the plasma through an aerosol guide tube and is analyzed by a quadrapole mass filter. The end portion of the tube is made of sapphire to make it resistant to the high temperature of the plasma. The result is improvement in the accuracy of the analysis.

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