Probe unit, driving method thereof, and scanning device for...

Details Probe unit, driving method thereof, and scanning device for... Probe unit, driving method thereof, and scanning device for...

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) G11B 9/00 (2006.01)

Patent

CA 2002187

ABSTRACT OF THE DISCLOSURE: A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed in the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.

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