Probe, manufacturing method therefor and scanning probe...

G - Physics – 01 – Q

Patent

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Details

G01Q 70/10 (2010.01) G01Q 60/06 (2010.01) G01Q 60/22 (2010.01) G01Q 60/32 (2010.01) G01Q 60/38 (2010.01)

Patent

CA 2200992

A probe for a near field scanning microscope and a method for manufacturing the probe are disclosed. A tip of the probe is sharpened and a transition portion 6 in a boundary zone between a base portion 5 and an elastic portion 4 is tapered. The elastic portion 4 has a cross-section that is smaller than that of the base portion 5. Also, a part of the elastic portion 4 may be shaped in a constricted region to increase the elasticity of the probe. The probe material is preferably an optical fiber having a core portion 2 that propagates light therethrough and a cladding portion 3 that differ in refractive index from each other. And the probe, except for an aperture at the tip, is coated by a metal film cladding 7. The advantage is a more flexible probe that permits soft or delicate surfaces to be scanned without damage to the surface or the probe tip. A further advantage is a microscope that can be used to investigate the optical characteristics as well as the surface topography of a sample.

Sonde pour un microscope à balayage pour champ proche et méthode de fabrication de la sonde. Une extrémité de la sonde est aiguisée et une partie intermédiaire 6, dans une zone limite entre la base 5 et la partie élastique 4, est effilée. La coupe de la partie élastique 4 est plus petite que celle de la base 5. En outre, une section de la partie élastique 4 peut être transformée en une partie à étranglement pour augmenter l'élasticité de la sonde. De préférence, la sonde est faite de fibre optique comportant un coeur 2 qui propage la lumière à l'intérieur et une gaine 3, lesquelles possèdent un indice de réfraction différent. La sonde, sauf pour une ouverture à son extrémité, est recouverte d'une gaine faite de couches métalliques 7. L'avantage de l'invention constitue une sonde plus flexible qui permet de balayer des surfaces molles ou délicates sans endommager la surface ou l'extrémité de la sonde. Un autre avantage : le microscope peut être utilisé pour examiner les caractéristiques optiques ainsi que la topographie de surface d'un échantillon.

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