Arrangement for encasing a functional device, and a process...

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H01L 23/02 (2006.01) G01P 1/02 (2006.01) H01L 21/50 (2006.01) H01L 21/54 (2006.01) H01L 23/04 (2006.01) H01L 23/057 (2006.01) H01L 23/16 (2006.01) H01L 23/22 (2006.01) H01L 23/24 (2006.01)

Patent

CA 2086825

2086825 9220096 PCTABS00017 The invention relates to an arrangement for the encasing of a functional device, e.g., a semiconductor element, a semiconductor-based element, a sensor element, a microactuator, or an electronic circuit consisting of one or more integrated circuits and other electronic components, and a process for preparing an arrangement of this kind. Around the functional device (47) is arranged a casing (43, 45) which forms a closed cavity (51) which completely or partly surrounds the functional device (47). The casing is made of a plastic material or another polymer material. The casing consists of two or more joined components (43, 45). Metal parts which form wire bonds (46) with said functional device (47) in the casing pass through the walls of said casing. At least one of the casing pass through the walls of said casing. At least one of the casing components has filling holes or filling ducts (52, 53) for the introduction of liquid and/or gel material (56) into said cavity, and the filling holes or filling canals are sealed (54, 55) after the volume of the cavity has been filled with said liquid or gel.

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