Method for making uhp tungsten hexafluoride

Details Method for making uhp tungsten hexafluoride Method for making uhp tungsten hexafluoride

C - Chemistry, Metallurgy

01

G

C01G 41/04 (2006.01)

Patent

CA 2314385

This invention is directed to a method for producing UHP tungsten hexafluoride by introducing an amount of crude tungsten hexafluoride to an evaporating process for separation into an amount of tungsten hexafluoride-containing volatile impurities and an amount of non-volatile metallic impurities; passing the amount of tungsten hexafluoride-containing volatile residue to a gas phase adsorption process for separation into an amount of semi-crude tungsten hexafluoride product and an amount of hydrogen fluoride non-volatile residue; and passing the amount of semi-crude tungsten hexafluoride product to a sparging system using UHP helium for separation into a non-volatile UHP tungsten hexafluoride product.

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