Fluorocarbon film and process for its production

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

C23C 14/12 (2006.01) C08J 7/12 (2006.01) C08L 101/00 (2006.01)

Patent

CA 2586258

This invention provides a process for producing a fluorocarbon film which can stably form a fluorocarbon film having excellent durability and functionality. The process for producing a fluorocarbon film at least a part of which is chemically bonded to a surface of a base material. The production process is characterized by conducting, in sequence, step (a) for applying plasma to a surface of a base material in a continuous or pulse manner to form active points on the surface of the base material and step (b) for applying plasma to the surface of the base material in a continuous or pulse manner in the presence of gas of a fluorocompound represented by general formula CxFy and/or CxFyOz under such conditions that active species are impacted against the surface of the base material at relatively lower collision energy than step (a).

Cette invention concerne un procédé servant à produire un film de fluorocarbone, lequel peut former de façon stable un film de fluorocarbone ayant d'excellentes durabilité et fonctionnalité. Le procédé sert à produire un film de fluorocarbone dont au moins une partie est liée chimiquement à une surface d'un matériau de base. Le procédé de production est caractérisé en ce qu'on effectue, l'une après l'autre, l'étape (a) servant à envoyer un plasma sur une surface d'un matériau de base d'une manière continue ou pulsée pour former des points actifs sur la surface du matériau de base et l'étape (b) servant à envoyer un plasma sur la surface du matériau de base d'une manière continue ou pulsée en présence d'un composé fluoré gazeux représenté par la formule générale C<SUB>x</SUB>F<SUB>y</SUB> et/ou C<SUB>x</SUB>F<SUB>y</SUB>O<SUB>z</SUB> dans des conditions telles que les espèces actives entrent en collision avec la surface du matériau de base avec une énergie de collision relativement plus faible que celle de l'étape (a).

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