Plasmas and methods of using them

Details Plasmas and methods of using them Plasmas and methods of using them

H - Electricity

05

H

H05H 1/00 (2006.01) H01J 49/26 (2006.01) H05H 1/26 (2006.01) H05H 1/30 (2006.01) G01N 21/31 (2006.01) G01N 21/73 (2006.01)

Patent

CA 2595230

Plasma devices and methods for using such plasma devices in analytical measurements are disclosed. In certain examples, a low flow plasma may be operative using a total argon gas flow of less than about five liters per minute, and in some embodiments, a plasma argon gas flow of less than about four liter per minute. In other examples, a plasma produced using inductive and capacitive coupling is disclosed.

L'invention concerne des dispositifs au plasma et des procédés d'utilisation desdits dispositifs au plasma dans des mesures analytiques. Dans certains exemples, un plasma à faible débit peut être utilisé conjointement à un débit d'argon total inférieur à environ cinq litres par minute, et dans certains modes de réalisation, un débit de plasma argon inférieur à environ quatre litres par minute. Dans d'autres exemples, l'invention concerne un plasma obtenu par couplage inductif et capacitif.

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