H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 27/146 (2006.01) G01J 5/20 (2006.01)
Patent
CA 2133081
In a microbolometer infrared radiation sensor, a detector material (VO2) having a high thermal coefficient of resistance to increase the sensitivity of the apparatus.
Honeywell Inc.
Smart & Biggar
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