Apparatus and methods for surface contour measurement

Details Apparatus and methods for surface contour measurement Apparatus and methods for surface contour measurement

G - Physics

01

B

G01B 11/24 (2006.01) G01B 11/245 (2006.01) G01S 17/08 (2006.01) G01S 17/32 (2006.01) G01S 17/89 (2006.01)

Patent

CA 2246374

Apparatus and methods of measuring position information, typically the depth coordinate, of a point on the surface of an object. In one embodiment, the apparatus includes two sources of radiation (P1, P2) positioned to illuminate the point (Pa) on the surface of the object (10) with radiation from each of the sources. The radiation from each of the sources is coherent with respect to the radiation from the other source. A control system (32) changes the phase of the radiation from at least one of the sources relative to the phase of the radiation from the other source as measured at the point on the surface of the object. A detector (22) is positioned to receive radiation scattered by the point and a processor (28), in communication with the detector, calculates position information in response to the change in phase of the radiation from the source and the received radiation scattered by the point on the surface of the object.

Dispositif et procédés de mesure d'informations relatives à la position, notamment la coordonnée de profondeur, d'un point sur la surface d'un objet. Dans un mode de réalisation, ce dispositif comprend deux sources de rayonnement (P1, P2) placées de manière à éclairer le point (P0) sur la surface de l'objet (10), au moyen d'un rayonnement provenant de chacune des sources, chaque rayonnement étant cohérent par rapport à l'autre. Un système de commande (32) change la phase du rayonnement, provenant d'au moins l'une des sources, par rapport à la phase du rayonnement provenant de l'autre source, telle que mesurée au niveau du point sur la surface de l'objet. On a placé un détecteur (22) destiné à recevoir le rayonnement diffusé par le point, et un processeur (28), communiquant avec le détecteur, calcule les informations relatives à la position du point en réponse au changement de phase du rayonnement provenant de la source et au rayonnement diffusé par le point sur la surface de l'objet.

Affiliated with

Also associated with

Rating

Apparatus and methods for surface contour measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and methods for surface contour measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and methods for surface contour measurement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1850576