H - Electricity – 01 – J
Patent
H - Electricity
01
J
314/43.4
H01J 3/32 (2006.01) H01J 37/147 (2006.01) H01J 37/30 (2006.01)
Patent
CA 2039581
A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic tails spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided fox maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.
Etec Systems Inc.
Osler Hoskin & Harcourt Llp
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