Method of producing organo indium chlorides

C - Chemistry – Metallurgy – 07 – F

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C07F 5/00 (2006.01) C07F 7/08 (2006.01)

Patent

CA 2235164

A method for producing organo metal chlorides directly from molten metal. The organo metal chlorides are formed by contacting an organo chloride directly with a metal melt. The preferred method includes the use of indium as the metal and methyl chloride as the organo chloride. The direct contact of the methyl chloride with the indium metal results in the production of dimethyl indium chloride or methyl indium dichloride depending on the contacting time and efficiency of the process. The resulting products are suitable for use as a precursor gas for chemical vapor deposition processes. Additionally, activator compounds such as oxides or halides are optionally added to the metal melt to enhance the reaction rate.

L'invention porte sur un procédé de production de chlorures d'organo-indium obtenus directement à partir du métal fondu. On forme les chlorures organométalliques en mettant directement en contact un organochlorure avec un métal fondu. Le procédé préféré consiste à utiliser l'indium comme métal et le chlorure méthylique comme organo chlorure. Le contact direct du chlorure de méthyle avec l'indium métal permet de produire un chlorure de diméthyle indium ou un bichlorure de méthyle indium selon la durée du contact et l'efficacité du processus. Les produits obtenus sont appropriés pour être utilisés comme gaz précurseur dans les méthodes de dépôt chimique en phase vapeur. En outre, des composés d'activation tels que des oxydes ou des halogénures sont éventuellement ajoutés au métal fondu pour accroître la vitesse de réaction.

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