Process for preparing superconducting thin films

Details Process for preparing superconducting thin films Process for preparing superconducting thin films

C - Chemistry, Metallurgy

23

C

356/179, 117/74,

C23C 14/28 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2022358

A process for preparing an oxide thin film on a substrate by a vacuum evaporation method, particularly by MBE with introducing a mixed gas of O2 and N2 or N2O gas which is exited by microwave discharge in the neighborhood of the substrate.

Méthode pour obtenir une mince pellicule d'oxyde sur un substrat A par évaporation sous vide, notamment par MBE avec introduction d'un mélange gazeux d'O2 et de N2 ou de N2O, excité par une décharge de micro-ondes au voisinage du substrat.

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