Piezoelectric substrate material with an increased...

Details Piezoelectric substrate material with an increased... Piezoelectric substrate material with an increased...

H - Electricity

01

L

H01L 41/08 (2006.01) G03F 7/09 (2006.01) H01L 41/04 (2006.01) H03H 3/08 (2006.01) H03H 9/02 (2006.01)

Patent

CA 2399122

The aim of the invention is to increase resistance to breaking and to prevent optical reflections during structuring for producing components on piezoelectric substrates. To this end, an absorber layer (2) which has high optical absorption, binds particles and seals cracks is provided on the rear side of the substrate (1). The absorber layer (2) is advantageously also electroconductive in order to be able to divert pyroelectric charges.

L'invention vise à augmenter la résistance à la rupture de composants posés sur des substrats piézo-électriques. A cet effet, on applique sur la face arrière du substrat une couche d'absorption dont l'absorption optique est élevée. Cette couche d'absorption lie les particules et est scellée contre les craquelures.

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