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Patent
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Patent
CA 2261202
A pressure transducer that includes at least two sensors having substantially similar or substantially indentical error characteristics, wherein each sensor is arranged to be subjected to an applied pressure and the outputs of the sensors are electrically coupled so that errors associated with one sensor are compensated by errors associated with the other sensor. The sensors may be substantially identical silicon sensors formed in close proximity on the same wafer.
L'invention concerne un transducteur de pression comportant au moins deux capteurs dont les caractéristiques sont sensiblement similaires. Chaque capteur est disposé de façon à être soumis à une pression et leurs sorties sont couplées électriquement de sorte que des erreurs associées à un capteur soient compensées par des erreurs associées à l'autre capteur. Ces capteurs peuvent être des capteurs au silicium sensiblement identiques, formés tout près les uns des autres sur la même tranche.
Breitenbach Alexander
Dauenhauer Dale
Dauenhauer Dennis
Erichsen Herman
Data Instruments Inc.
Honeywell Data Instruments Inc.
Smart & Biggar
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