Process for producing planar waveguide structures as well as...

H - Electricity – 01 – P

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H01P 11/00 (2006.01) G02B 6/132 (2006.01) G02B 6/136 (2006.01)

Patent

CA 2276959

A process for producing a waveguide is proposed, wherein a first layer is deposited on a silicon or glass substrate, a core structure is subsequently structured, and this core structure is protected by a protective layer. Prior to each step for depositing a new layer, the layer that has just been applied is fluorinated.

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