Sensor apparatus

Details Sensor apparatus Sensor apparatus

G - Physics

01

N

G01N 11/16 (2006.01) G01N 9/00 (2006.01) G01N 29/024 (2006.01) G01N 29/22 (2006.01) G01N 29/34 (2006.01) G01N 33/03 (2006.01)

Patent

CA 2065466

P/8187/MRC/US - 20 - ABSTRACT SENSOR APPARATUS A sensor, for use in determining physical properties of fluid, comprises a flexible diaphragm having a plane. Two tines depend from the diaphragm substantially at right angles to the plane. First and second substantially planar transducers are each bonded to the diaphragm so that the plane of the transducers are parallel to that of the diaphragm. A first one of the transducers is operative, in use, to flex between in its plane and to couple an alternating driving force into the plane of the diaphragm such that the tines vibrate in an oscillatory motion. Second of the transducers is operative to detect vibrations of the diaphragm.

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