Device for generating an ion beam

Details Device for generating an ion beam Device for generating an ion beam

H - Electricity

01

J

H01J 27/22 (2006.01) H01J 27/02 (2006.01)

Patent

CA 2442189

The invention relates to a device for generating an ion beam. The inventive device comprises an ion source (2), a means (6) for extracting ions emitted by said source, a means (8) for accelerating ions thus extracted, a means (34) for selecting ions thus accelerated and an electrostatic optical system (10) that is intended to focus the ions thus selected along a first axis (Z1). Said device also comprises a means (F) for varying the distance (D) between the ion source and the ion extraction means, said distance being included along a second axis (Z) which is parallel to the first axis and which constitutes the axis of the beam of ions (14) emitted by the source. The invention is particularly suitable for the production of nano-structures.

Dispositif de génération d'un faisceau d'ions. Ce dispositif comprend une source d'ions (2), un moyen (6) d'extraction des ions émis par la source, un moyen (8) d'accélération des ions ainsi extraits, un moyen (34) de sélection des ions ainsi accélérés et un système d'optique électrostatique (10) destiné à focaliser les ions ainsi sélectionnés selon un premier axe (Z1), et le dispositif comprend en outre un moyen (F) de variation de la distance (D) entre la source d'ions et le moyen d'extraction des ions, cette distance étant comptée suivant un deuxième axe (Z) qui est parallèle au premier axe et constitue l'axe du faisceau d'ions (14) émis par la source. L'invention s'applique notamment à la fabrication de nano-structures.

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