Thin film ferroelectric capacitors having improved memory...

Details Thin film ferroelectric capacitors having improved memory... Thin film ferroelectric capacitors having improved memory...

H - Electricity

01

L

H01L 21/3205 (2006.01) H01L 21/02 (2006.01) H01L 27/115 (2006.01) H01L 21/768 (2006.01)

Patent

CA 2251219

A ferroelectric thin film capacitor (400) has smooth electrodes (412, 420) permitting comparatively stronger polarization, less fatigue, and less imprint, as the ferroelectric capacitor ages. The smooth electrode surfaces (414, 428) are produced by carefully controlled drying, soft baking, and annealing conditions.

Un condensateur (400) à couches minces ferroélectriques présente des électrodes lisses (412, 420) permettant comparativement une polarisation plus forte, moins de fatigue et moins d'empreinte à mesure que le condensateur ferroélectrique vieillit. On produit les surfaces (414, 428) d'électrodes lisses dans des conditions de séchage, de cuisson et de recuit doux soigneusement régulées.

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