Multilayer structure, used in particular as a material with...

Details Multilayer structure, used in particular as a material with... Multilayer structure, used in particular as a material with...

B - Operations, Transporting

32

B

B32B 15/20 (2006.01) B32B 15/18 (2006.01) C23C 2/12 (2006.01) C23C 16/40 (2006.01) H01L 21/28 (2006.01) H01L 21/316 (2006.01) H01L 29/51 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2415324

Structure multicouche, utilisée notamment en tant que matériau de forte permittivité relative, caractérisée en ce qu'elle comporte une pluralité de couches distinctes, chacune d'une épaisseur inférieure à 500 à, et dont certaines sont réalisée à base d'aluminium, d'hafnium et d'oxygène, et notamment à partir de dioxyde d'hafnium (HfO2) et d'alumine (A1O3). En pratique, les couches de dioxyde d'hafnium et d'alumine forment des alliages de formule Hf xAl yO2. Avantageusement, la stoechiométrie des alliages Hf xAI yO2 varie d'une couche à l'autre.

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