Non-photographic method for patterning organic polymer films

Details Non-photographic method for patterning organic polymer films Non-photographic method for patterning organic polymer films

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H01L 21/70 (2006.01) B41M 1/12 (2006.01) B41M 3/00 (2006.01) G03F 7/00 (2006.01) H01L 21/48 (2006.01) H05K 3/00 (2006.01) H05K 3/02 (2006.01) H05K 3/12 (2006.01) H05K 3/46 (2006.01)

Patent

CA 2069306

2069306 9106118 PCTABS00005 A non-photographic method for making patterns in organic polymer films comprising the sequential steps: (a) applying to a substrate an unpatterned first layer comprising a solid organic polymer which is dispersible in a predetermined eluant; (b) applying to the unpatterned first layer a patterned second layer comprising an agent which is capable of changing the dispersibility of the solid organic polymer in the predetermined eluant; (c) effecting patterned diffusion of the dispersibility-changing agent into the underlying solid organic polymer layer; and (d) removing the areas of the underlying solid organic polymer which are dispersible in the eluant by washing them with the predetermined eluant.

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