Multi-chamber installation for treating objects under...

C - Chemistry – Metallurgy – 23 – C

Patent

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Details

C23C 16/44 (2006.01) C23C 14/22 (2006.01) C23C 14/56 (2006.01) C23C 16/54 (2006.01) F01C 21/10 (2006.01) F04C 18/344 (2006.01) F04C 23/00 (2006.01) F04C 25/02 (2006.01) F04D 25/16 (2006.01)

Patent

CA 2462934

The invention relates to a multi-chamber installation (1) for treating objects under vacuum, comprising an evacuation system (5) that is connected to the chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump comprising several stages (11, 12, 13) constitutes one component of the evacuation system (5), each of said stages being equipped with an inlet (14, 15, 16) and each of the latter being connected to one of the chambers (2, 3, 4).

L'invention concerne une installation multichambre (1) pour le traitement d'objets sous vide, comprenant un système de mise sous vide (5) raccordé aux chambres (2, 3, 4). En vue de réduire la complexité du processus de mise sous vide, on utilise comme composant du système de mise sous vide (5), une pompe à vide préliminaire à plusieurs étages (11, 12, 13), chacun desdits étages présentant une entrée (14, 15, 16), et chacune de ces entrées étant raccordée à l'une des chambres (2, 3, 4).

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