Method for producing needle diamond-type structure

Details Method for producing needle diamond-type structure Method for producing needle diamond-type structure

C - Chemistry, Metallurgy

30

B

C30B 33/12 (2006.01) H01J 9/02 (2006.01)

Patent

CA 2266803

A method for producing a needle diamond-type structure comprises steps of placing an anodized alumina on a diamond substrate, which anodized alumina has a plurality of through holes and functions as a mask; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on the diamond substrate; removing the anodized alumina; and performing a plasma etching treatment using the dots as a mask, thereby forming regularly arranged needle-type diamond columns.

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